CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication
Integration of Complimentary Metal-Oxide-Semiconductor (CMOS) and Microelectromechanical System (MEMS) technology in Fabry Perot blood pressure sensor (FPPS) fabrication processes is presented. The sensor that comprises of a 125 µm diameter of circular diaphragm is modeled to be fabricated using int...
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Main Authors: | Ngajikin, Nor Hafizah, Low, Yee Ling, Ismail, Nur Izzati, Mohd. Supaát, Abu Sahmah, Ibrahim, Mohd. Haniff, Mohd. Kassim, Norazan |
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Format: | Article |
Language: | English |
Published: |
Penerbit UTM
2013
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/50078/1/NorHafizahNgajikin2013_Cmos-memsintegrationinmicrofabry.pdf http://eprints.utm.my/id/eprint/50078/ http://dx.doi.org/10.11113/jt.v64.2083 |
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