CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication

• Main Authors: Ngajikin, Nor Hafizah, Low, Yee Ling, Ismail, Nur Izzati, Mohd. Supaát, Abu Sahmah, Ibrahim, Mohd. Haniff, Mohd. Kassim, Norazan
• Format: Article
• Language: English
• Published: Penerbit UTM 2013
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.utm.my/id/eprint/50078/1/NorHafizahNgajikin2013_Cmos-memsintegrationinmicrofabry.pdf; http://eprints.utm.my/id/eprint/50078/; http://dx.doi.org/10.11113/jt.v64.2083

Integration of Complimentary Metal-Oxide-Semiconductor (CMOS) and Microelectromechanical System (MEMS) technology in Fabry Perot blood pressure sensor (FPPS) fabrication processes is presented. The sensor that comprises of a 125 µm diameter of circular diaphragm is modeled to be fabricated using int...