CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication
Integration of Complimentary Metal-Oxide-Semiconductor (CMOS) and Microelectromechanical System (MEMS) technology in Fabry Perot blood pressure sensor (FPPS) fabrication processes is presented. The sensor that comprises of a 125 µm diameter of circular diaphragm is modeled to be fabricated using int...
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my.utm.500782018-09-27T04:12:05Z http://eprints.utm.my/id/eprint/50078/ CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication Ngajikin, Nor Hafizah Low, Yee Ling Ismail, Nur Izzati Mohd. Supaát, Abu Sahmah Ibrahim, Mohd. Haniff Mohd. Kassim, Norazan TA Engineering (General). Civil engineering (General) Integration of Complimentary Metal-Oxide-Semiconductor (CMOS) and Microelectromechanical System (MEMS) technology in Fabry Perot blood pressure sensor (FPPS) fabrication processes is presented. The sensor that comprises of a 125 µm diameter of circular diaphragm is modeled to be fabricated using integration of CMOS-MEMS technology. To improve the sensor reliability, a sleeve structure is designed at the back of Silicon wafer by using MEMS Deep Reactive ion Etching (DRIE) process for fiber insertion, which offers a large bonding area. Optical light source at 550 nm wavelength is chosen for this device. The sensor diaphragm mechanic deflection and its optical spectrum is theoretically analyzed and simulated. The analytical results show high linear response in the range of 0 to 40 kPa and a reasonable sensitivity of 1.83 nm/kPa (spectrum shift/pressure) has been obtained for this sensor. The proposed integration of CMOS-MEMS technology limit the material selection yet produces an economical method of FPPS fabrication and integrated system Penerbit UTM 2013 Article PeerReviewed application/pdf en http://eprints.utm.my/id/eprint/50078/1/NorHafizahNgajikin2013_Cmos-memsintegrationinmicrofabry.pdf Ngajikin, Nor Hafizah and Low, Yee Ling and Ismail, Nur Izzati and Mohd. Supaát, Abu Sahmah and Ibrahim, Mohd. Haniff and Mohd. Kassim, Norazan (2013) CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication. Jurnal Teknologi (Sciences and Engineering), 64 (3). pp. 83-87. ISSN 0127-9696 http://dx.doi.org/10.11113/jt.v64.2083 DOI: 10.11113/jt.v64.2083 |
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TA Engineering (General). Civil engineering (General) Ngajikin, Nor Hafizah Low, Yee Ling Ismail, Nur Izzati Mohd. Supaát, Abu Sahmah Ibrahim, Mohd. Haniff Mohd. Kassim, Norazan CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication |
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Integration of Complimentary Metal-Oxide-Semiconductor (CMOS) and Microelectromechanical System (MEMS) technology in Fabry Perot blood pressure sensor (FPPS) fabrication processes is presented. The sensor that comprises of a 125 µm diameter of circular diaphragm is modeled to be fabricated using integration of CMOS-MEMS technology. To improve the sensor reliability, a sleeve structure is designed at the back of Silicon wafer by using MEMS Deep Reactive ion Etching (DRIE) process for fiber insertion, which offers a large bonding area. Optical light source at 550 nm wavelength is chosen for this device. The sensor diaphragm mechanic deflection and its optical spectrum is theoretically analyzed and simulated. The analytical results show high linear response in the range of 0 to 40 kPa and a reasonable sensitivity of 1.83 nm/kPa (spectrum shift/pressure) has been obtained for this sensor. The proposed integration of CMOS-MEMS technology limit the material selection yet produces an economical method of FPPS fabrication and integrated system |
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Article |
author |
Ngajikin, Nor Hafizah Low, Yee Ling Ismail, Nur Izzati Mohd. Supaát, Abu Sahmah Ibrahim, Mohd. Haniff Mohd. Kassim, Norazan |
author_facet |
Ngajikin, Nor Hafizah Low, Yee Ling Ismail, Nur Izzati Mohd. Supaát, Abu Sahmah Ibrahim, Mohd. Haniff Mohd. Kassim, Norazan |
author_sort |
Ngajikin, Nor Hafizah |
title |
CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication |
title_short |
CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication |
title_full |
CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication |
title_fullStr |
CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication |
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CMOS-MEMS integration in micro Fabry Perot pressure sensor fabrication |
title_sort |
cmos-mems integration in micro fabry perot pressure sensor fabrication |
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Penerbit UTM |
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2013 |
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http://eprints.utm.my/id/eprint/50078/1/NorHafizahNgajikin2013_Cmos-memsintegrationinmicrofabry.pdf http://eprints.utm.my/id/eprint/50078/ http://dx.doi.org/10.11113/jt.v64.2083 |
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