Ge-rich SiGe thin film deposition by co-sputtering in in-situ and ex-situ solid phase crystallization for photovoltaic applications

• Main Authors: Seyed Ahmad, Shahahmadi, Ahmad Aizan, Zulkefle, A.K.M., Hasan, S.M., Rana, Badariah, Bais, Md D., Akhtaruzzaman, Abdul Rahman M., Alamoud, Nowshad, Amin
• Format: Article
• Language: English
• Published: Elsevier Ltd. 2016
• Online Access: http://eprints.utem.edu.my/id/eprint/17697/2/Ge%20rich.PDF; http://eprints.utem.edu.my/id/eprint/17697/; http://www.sciencedirect.com/science/article/pii/S1369800116302529; http://dx.doi.org/10.1016/j.mssp.2016.08.005

This study investigates the properties of high Ge content silicon-germanium thin films in the non-hydrogenated state (Ge-rich SiGe) deposited on glass by RF magnetron co-sputtering in both in-situ and ex-situ solid phase crystallization (SPC) at various temperatures, such as RT to 550 °C. The struct...