Ge-rich SiGe thin film deposition by co-sputtering in in-situ and ex-situ solid phase crystallization for photovoltaic applications
This study investigates the properties of high Ge content silicon-germanium thin films in the non-hydrogenated state (Ge-rich SiGe) deposited on glass by RF magnetron co-sputtering in both in-situ and ex-situ solid phase crystallization (SPC) at various temperatures, such as RT to 550 °C. The struct...
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Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier Ltd.
2016
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Online Access: | http://eprints.utem.edu.my/id/eprint/17697/2/Ge%20rich.PDF http://eprints.utem.edu.my/id/eprint/17697/ http://www.sciencedirect.com/science/article/pii/S1369800116302529 http://dx.doi.org/10.1016/j.mssp.2016.08.005 |
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