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Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique

This study presents the deposition of micro contact probe cell for IC testing deposited by dc sputtering technique on a glass substrate. Micro contact with thickness of 2800-7000 nm were deposited from Copper target at sputtering power of 125 W in argon ambient at a room temperature on a base la...

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Main Authors: Muhammad Idzdihar , Idris, Nowshad , Amin, Faiz , Arith, Siti Amaniah, Mohd Chachuli
Format: Article
Language:English
Published: Maxwell Scientific Publications 2014
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/12547/1/v7-2701-2704.pdf
http://eprints.utem.edu.my/id/eprint/12547/
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spelling my.utem.eprints.125472015-05-28T04:25:53Z http://eprints.utem.edu.my/id/eprint/12547/ Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique Muhammad Idzdihar , Idris Nowshad , Amin Faiz , Arith Siti Amaniah, Mohd Chachuli TK Electrical engineering. Electronics Nuclear engineering This study presents the deposition of micro contact probe cell for IC testing deposited by dc sputtering technique on a glass substrate. Micro contact with thickness of 2800-7000 nm were deposited from Copper target at sputtering power of 125 W in argon ambient at a room temperature on a base layer of copper using mask. Then, the micro contacts were investigated by using profilometer. All the obtained results show the potential viability of the novel test fixture and thus solve the limitation Maxwell Scientific Publications 2014-04-05 Article PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/12547/1/v7-2701-2704.pdf Muhammad Idzdihar , Idris and Nowshad , Amin and Faiz , Arith and Siti Amaniah, Mohd Chachuli (2014) Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique. Research Journal of Applied Sciences, Engineering and Technology. pp. 2701-2704. ISSN 2040-7459
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Muhammad Idzdihar , Idris
Nowshad , Amin
Faiz , Arith
Siti Amaniah, Mohd Chachuli
Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique
description This study presents the deposition of micro contact probe cell for IC testing deposited by dc sputtering technique on a glass substrate. Micro contact with thickness of 2800-7000 nm were deposited from Copper target at sputtering power of 125 W in argon ambient at a room temperature on a base layer of copper using mask. Then, the micro contacts were investigated by using profilometer. All the obtained results show the potential viability of the novel test fixture and thus solve the limitation
format Article
author Muhammad Idzdihar , Idris
Nowshad , Amin
Faiz , Arith
Siti Amaniah, Mohd Chachuli
author_facet Muhammad Idzdihar , Idris
Nowshad , Amin
Faiz , Arith
Siti Amaniah, Mohd Chachuli
author_sort Muhammad Idzdihar , Idris
title Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique
title_short Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique
title_full Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique
title_fullStr Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique
title_full_unstemmed Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique
title_sort deposition of micro contact based probe cell for ic testing by dc magnetron sputtering technique
publisher Maxwell Scientific Publications
publishDate 2014
url http://eprints.utem.edu.my/id/eprint/12547/1/v7-2701-2704.pdf
http://eprints.utem.edu.my/id/eprint/12547/
_version_ 1665905505898332160
score 13.15806

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