Deposition of Micro Contact Based Probe Cell for IC Testing by Dc Magnetron Sputtering Technique

• Main Authors: Muhammad Idzdihar , Idris, Nowshad , Amin, Faiz , Arith, Siti Amaniah, Mohd Chachuli
• Format: Article
• Language: English
• Published: Maxwell Scientific Publications 2014
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/12547/1/v7-2701-2704.pdf; http://eprints.utem.edu.my/id/eprint/12547/

This study presents the deposition of micro contact probe cell for IC testing deposited by dc sputtering technique on a glass substrate. Micro contact with thickness of 2800-7000 nm were deposited from Copper target at sputtering power of 125 W in argon ambient at a room temperature on a base la...