Development Of Si02 Thin Film On singlecrystal Sic By anodic oxidation technique.

• Main Authors: Cheong, Kuan Yew, Purwadaria, Sunara, Lockman, Zainovia
• Format: Monograph
• Published: Universiti Sains Malaysia 2008
• Subjects: TN1-997 Mining engineering. Metallurgy
• Online Access: http://eprints.usm.my/10152/

Anodic silicon dioxide (Si02) thin film is growth on p- and n-type silicon (Si) and p-type 4H-silicon carbide (SiC) substrate with the thickness ranging from 50-130 nm. Filem nipis Si02 tersadur anod telah ditumbuhkankan di atas substrat silikon (Si) jenis p dan n serta silikon karbida jenis-p de...