Effects Of Post-Deposition Annealing Temperature And Time On Physical Properties Of Metal-Organic Decomposed Lanthanum Cerium Oxide Thin Film.
Lanthanum cerium oxide (LaxCeyOz) precursor was prepared using metal-organic decomposition method. The effects of post-deposition annealing temperatures (400-1000 °C) and annealing time (15-120 minutes) in argon ambient on physical properties of the deposited film were investigated.
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://eprints.usm.my/19503/1/OFN4101.pdf http://eprints.usm.my/19503/ |
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