Impact of KOH etching on nanostructure fabricated by local anodic oxidation method

• Main Authors: Dehzangi, Arash, Larki, Farhad, Majlis, Burhanuddin Yeop, Naseri, Mahmood Goodarz, Navasery, Manizheh, Abdullah, A. Makarimi, Hutagalung, Sabar D., Abdul Hamid, Norihan, Mohd Noor, Mimiwaty, Vakilian, Mohammadmahdi, Saion, Elias
• Format: Article
• Language: English
• Published: Electrochemical Science Group 2013
• Online Access: http://psasir.upm.edu.my/id/eprint/30415/1/Impact%20of%20KOH%20etching%20on%20nanostructure%20fabricated%20by%20local%20anodic%20oxidation%20method.pdf; http://psasir.upm.edu.my/id/eprint/30415/; http://www.electrochemsci.org/list13.htm#issue6

In this letter, we investigate the impact of potassium hydroxide (KOH) etching procedure on Silicon nanostructure fabricated by Atomic force microscopy on P-type Silicon-on-insulator. An electrochemical process, as the local anodic oxidation followed by two wet chemical etching steps, KOH etch...