An approximate method for solving unsteady transitional and rarefied flow regimes in pulsed pressure chemical vapor deposition process using the quiet direct simulation method
The Quiet Direct Simulation (QDS) method is a kinetic-based flux scheme that computes true-direction fluxes of mass, momentum and energy with high computational efficiency. In QDS, the molecular velocity is represented by the Maxwell-Boltzmann equilibrium distribution approximated by a Gauss-Hermite...
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Main Authors: | Lim C.W., Cave H.M., Jermy M.C., Krumdieck S.P., Wu J.-S. |
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Other Authors: | 35722335000 |
Format: | Conference Paper |
Published: |
2023
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