An approximate method for solving unsteady transitional and rarefied flow regimes in pulsed pressure chemical vapor deposition process using the quiet direct simulation method

• Main Authors: Lim C.W., Cave H.M., Jermy M.C., Krumdieck S.P., Wu J.-S.
• Other Authors: 35722335000
• Format: Conference Paper
• Published: 2023
• Subjects: CFD; Kinetic theory method; Low pressure flow; Quiet Direct Simulation (QDS); Unsteady flow

The Quiet Direct Simulation (QDS) method is a kinetic-based flux scheme that computes true-direction fluxes of mass, momentum and energy with high computational efficiency. In QDS, the molecular velocity is represented by the Maxwell-Boltzmann equilibrium distribution approximated by a Gauss-Hermite...