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A very high Q-factor inductor using MEMS technology

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Bibliographic Details
Main Authors: Khalid, N., Shah, K., Singh, J., Le, H. P., Devlin, J., Zaliman, Sauli, Lt. Assoc. Prof.
Format: Working Paper
Language:English
Published: SPIE 2010
Subjects:
High Quality (Q) factor
high radio frequency (RF)
Inductor
Micro-electro-mechanical System (MEMS)
Q-factor
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8426
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