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A very high Q-factor inductor using MEMS technology

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Main Authors: Khalid, N., Shah, K., Singh, J., Le, H. P., Devlin, J., Zaliman, Sauli, Lt. Assoc. Prof.
Format: Working Paper
Language:English
Published: SPIE 2010
Subjects:
High Quality (Q) factor
high radio frequency (RF)
Inductor
Micro-electro-mechanical System (MEMS)
Q-factor
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8426
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spelling my.unimap-84262010-08-02T05:00:10Z A very high Q-factor inductor using MEMS technology Khalid, N. Shah, K. Singh, J. Le, H. P. Devlin, J. Zaliman, Sauli, Lt. Assoc. Prof. High Quality (Q) factor high radio frequency (RF) Inductor Micro-electro-mechanical System (MEMS) Q-factor Link to publisher's homepage at http://spiedigitallibrary.aip.org/ 2010-08-02T05:00:10Z 2010-08-02T05:00:10Z 2010-03-30 Working Paper Proceeding of SPIE, vol. 7646 (1), 2010, p.76461I 978-081948061-3 0277-786X http://dx.doi.org/10.1117/12.848686 http://hdl.handle.net/123456789/8426 en Proceedings of the Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010 SPIE
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic High Quality (Q) factor
high radio frequency (RF)
Inductor
Micro-electro-mechanical System (MEMS)
Q-factor
spellingShingle High Quality (Q) factor
high radio frequency (RF)
Inductor
Micro-electro-mechanical System (MEMS)
Q-factor
Khalid, N.
Shah, K.
Singh, J.
Le, H. P.
Devlin, J.
Zaliman, Sauli, Lt. Assoc. Prof.
A very high Q-factor inductor using MEMS technology
description Link to publisher's homepage at http://spiedigitallibrary.aip.org/
format Working Paper
author Khalid, N.
Shah, K.
Singh, J.
Le, H. P.
Devlin, J.
Zaliman, Sauli, Lt. Assoc. Prof.
author_facet Khalid, N.
Shah, K.
Singh, J.
Le, H. P.
Devlin, J.
Zaliman, Sauli, Lt. Assoc. Prof.
author_sort Khalid, N.
title A very high Q-factor inductor using MEMS technology
title_short A very high Q-factor inductor using MEMS technology
title_full A very high Q-factor inductor using MEMS technology
title_fullStr A very high Q-factor inductor using MEMS technology
title_full_unstemmed A very high Q-factor inductor using MEMS technology
title_sort very high q-factor inductor using mems technology
publisher SPIE
publishDate 2010
url http://dspace.unimap.edu.my/xmlui/handle/123456789/8426
_version_ 1643789175008264192
score 13.214268

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