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A review: Properties of silicon carbide materials in MEMS application

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Bibliographic Details
Main Authors:	Noraini, Marsi, Burhanuddin, Yeop Majlis, Faisal Mohd, Yasin, Hafzaliza Erny, Zainal Abidin, Azrul Azlan, Hamzah
Other Authors:	mnoraini@uthm.edu.my
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis (UniMAP) 2021
Subjects:	MEMS Silicon carbide High temperature Radiation Sensor
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528
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