A review: properties of silicon carbide materials in MEMS application
The paper presents the review properties of silicon carbide materials in the MEMS application. The study aims to explore silicon carbide in MEMS technology which considers the development of microscale and integrated devices that combine electronics, electrical and mechanical elements. MEMS has beco...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
UNIMAP
2020
|
| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/6333/1/AJ%202020%20%28814%29.pdf http://eprints.uthm.edu.my/6333/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|