Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology
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Main Authors: | Uda, Hashim, Ramzan, Mat Ayub, Nik Hazura, Nik Hamat |
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Format: | Article |
Language: | English |
Published: |
Universiti Kebangsaan Malaysia
2009
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Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/6889 |
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