Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology
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Universiti Kebangsaan Malaysia
2009
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my.unimap-68892009-08-13T08:54:30Z Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology Uda, Hashim Ramzan, Mat Ayub Nik Hazura, Nik Hamat Borophosphosilicate glass Hydrofluoric acid staining Steam annealing Microelectronics -- Materials Integrated circuits -- Materials Metal oxide semiconductors, Complementary Link to publisher's homepage at http://pkukmweb.ukm.my/~jsm/ This paper involves the planarization of borophosphosilicate glass (BPSG) film using a new recipe for annealing process to improve the borophosphosilicate glass (BPSG) film flatness after reflow. This improvement is for 0.35μm technology using steam annealing method at different temperatures. This process allows the planarization of wafers with thin layer at its surface. In this paper we present the comparison between the effect of hydrofluoric acid (HF) staining on the cross sectional topography with the samples without hydrofluoric acid (HF) staining analyzed by field emission scanning electron microscopy (FESEM). We found that staining with HF produced clearer images. 2009-08-13T08:53:44Z 2009-08-13T08:53:44Z 2007 Article Sains Malaysiana, vol.36 (1), 2007, pages 53-57. 0126-6039 http://pkukmweb.ukm.my/~jsm/ http://hdl.handle.net/123456789/6889 en Universiti Kebangsaan Malaysia |
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Borophosphosilicate glass Hydrofluoric acid staining Steam annealing Microelectronics -- Materials Integrated circuits -- Materials Metal oxide semiconductors, Complementary |
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Borophosphosilicate glass Hydrofluoric acid staining Steam annealing Microelectronics -- Materials Integrated circuits -- Materials Metal oxide semiconductors, Complementary Uda, Hashim Ramzan, Mat Ayub Nik Hazura, Nik Hamat Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology |
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Link to publisher's homepage at http://pkukmweb.ukm.my/~jsm/ |
format |
Article |
author |
Uda, Hashim Ramzan, Mat Ayub Nik Hazura, Nik Hamat |
author_facet |
Uda, Hashim Ramzan, Mat Ayub Nik Hazura, Nik Hamat |
author_sort |
Uda, Hashim |
title |
Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology |
title_short |
Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology |
title_full |
Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology |
title_fullStr |
Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology |
title_full_unstemmed |
Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology |
title_sort |
borophosphosilicate glass (bpsg) reflow characterization for submicron cmos technology |
publisher |
Universiti Kebangsaan Malaysia |
publishDate |
2009 |
url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/6889 |
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1643788616962408448 |
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13.19449 |