Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology

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Bibliographic Details
Main Authors: Uda, Hashim, Ramzan, Mat Ayub, Nik Hazura, Nik Hamat
Format: Article
Language:English
Published: Universiti Kebangsaan Malaysia 2009
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Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/6889
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Summary:Link to publisher's homepage at http://pkukmweb.ukm.my/~jsm/