Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization

• Main Author: Siti Fatimah, Abd Rahman
• Format: Thesis
• Language: English
• Published: Universiti Malaysia Perlis (UniMAP) 2014
• Subjects: Silicon; Nanowires; Nanotechnology; Nanowires > Design and construction; Silicon nanowires (SiNWs)
• Online Access: http://dspace.unimap.edu.my:80/dspace/handle/123456789/33136

This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, the SiNWs sensor is designed via Elphy Quantum GDS II Editor and AutoCAD. A to...