Design and fabrication of n-isfet using SI₃N₄/SIO₂ structure for pH measurement

The design and fabrication of n-ISFET using Si₃N₄/SiO₂ structure for pH measurement has been carried out. In general Ion Sensitive Field Effect Transistor (ISFET) is a potentiometric pH sensor which widely used in chemical, biochemical and biomedical applications due to its advantages such as small...

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Bibliographic Details
Main Author: Nur Syuhada, Md. Desa
Format: Thesis
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2014
Subjects:
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/32470
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