Optimization on oxidation process using 2K factorial design method

• Main Author: Yeap Li Chian
• Other Authors: Noraini Othman (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Silicon; Oxidation; Silicon dioxide; Silicon oxidation; Design of Experiment (DOE)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/2010

Silicon technologies progress in the last twenty years has traced the path to the unprecedented revolution of information technologies, which has changed everybody’s lifestyles. With the help of software, the world of technology can be improve and get even better. In this project, design of exper...