Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method

Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and biomedical engineering. Fabrication of Nanowires is one of the great challenges t...

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主要作者: Mohammad Nuzaihan Md Nor
格式: Thesis
语言:English
出版: Universiti Malaysia Perlis 2008
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在线阅读:http://dspace.unimap.edu.my/xmlui/handle/123456789/1494
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