Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method

• 第一著者: Mohammad Nuzaihan Md Nor
• フォーマット: 学位論文
• 言語: English
• 出版事項: Universiti Malaysia Perlis 2008
• 主題: Silicon; Nanowires; Nanotechnology; Nanowires > Design and construction; Nanostructured materials
• オンライン･アクセス: http://dspace.unimap.edu.my/xmlui/handle/123456789/1494

Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and biomedical engineering. Fabrication of Nanowires is one of the great challenges t...