Reactive Ion Etching (RIE) Etched Wet-Silica-On-Silicon Analysis for Fluid Wettability

• Main Author: Noor Aini Hamimah Abd. Rahim
• Other Authors: Prabakaran Poopalan, Assoc. Prof. Dr. (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Silica; Reactive Ion Etching (RIE); Silica-on-silicon analysis; Surface roughness analysis; Atomic Force Microscope; Wet-Silica-On-Silicon Analysis
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1333

RIE etched wet silica-on-silicon analysis is more to surface roughness analysis which analysis on silica substrate after plasma etching especially on de-ionized water droplets testing for fluid wettability scope. The thick oxide is needed for RIE purpose and characterized the etching and surface pr...