Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon

• Main Author: Liew, Wai Soon
• Format: Thesis
• Published: 2001
• Subjects: QC Physics
• Online Access: http://studentsrepo.um.edu.my/2891/1/ABSTRAK.pdf; http://studentsrepo.um.edu.my/2891/2/KANDUNGAN.pdf; http://studentsrepo.um.edu.my/2891/3/PENDAHULUAN.pdf; http://studentsrepo.um.edu.my/2891/4/BAB_1.pdf; http://studentsrepo.um.edu.my/2891/5/BAB_2.pdf; http://studentsrepo.um.edu.my/2891/6/BAB_3.pdf; http://studentsrepo.um.edu.my/2891/7/BAB_4.pdf; http://studentsrepo.um.edu.my/2891/8/BAB_5.pdf; http://studentsrepo.um.edu.my/2891/9/BIBLIOGRAFI.pdf; http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01UTAMA/0/5?searchdata1="Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system"{245}; http://studentsrepo.um.edu.my/2891/