Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor

• Main Authors: Ab Rahim, Rosminazuin, Nordin, Anis Nurashikin, Abdul Malik, Noreha, Bais, Badariah, Majlis, Yeop Burhanuddin
• Format: Conference or Workshop Item
• Language: English; English
• Published: 2015
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/44490/1/44490.pdf; http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf; http://irep.iium.edu.my/44490/; http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7160998

In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresisti...