Application of focused ion beam micromachining: a review
Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf http://irep.iium.edu.my/27010/ http://www.scientific.net/AMR.576.507 |
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