Mechanical analysis of MEMS diaphragm for bladder pressure monitoring

• Main Authors: Norliana, Yusof, Badariah, Bais, Burhanuddin Yeop, Majlis, Norhayati, Soin
• Format: Conference or Workshop Item
• Language: English
• Published: 2017
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.unisza.edu.my/1151/1/FH03-FRIT-18-12572.jpg; http://eprints.unisza.edu.my/1151/

Implantable bladder pressure sensor need to be very sensitive due to its very low pressure range detection. Hence, proper choice of a diaphragm structure is important as it would give an enormous impact on the sensitivity of a MEMS sensor. In this study, finite element (FEA) analysis is conducted to...