Mechanical analysis of MEMS diaphragm for bladder pressure monitoring
Implantable bladder pressure sensor need to be very sensitive due to its very low pressure range detection. Hence, proper choice of a diaphragm structure is important as it would give an enormous impact on the sensitivity of a MEMS sensor. In this study, finite element (FEA) analysis is conducted to...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
|
| Subjects: | |
| Online Access: | http://eprints.unisza.edu.my/1151/1/FH03-FRIT-18-12572.jpg http://eprints.unisza.edu.my/1151/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
