Design, Simulation and Modeling of a Micromachined U-shaped Cantilever Device for Application in Magnetic Field Detection
The research explores the potential applicability of the Lorentz force actuation of a MEMS based U-shaped cantilever which is made entirely of aluminum. The main objective of the study is to design, simulate and derive mathematical models for the behavior of the cantilever. The design is based on CM...
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| 格式: | Thesis |
| 语言: | English |
| 出版: |
2010
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| 在线阅读: | http://utpedia.utp.edu.my/id/eprint/2923/1/THESIS...pdf http://utpedia.utp.edu.my/id/eprint/2923/ |
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