Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever

• Main Authors: Dennis , John Ojur, Talha , W.A., Hamid , N.H.B.
• Format: Conference or Workshop Item
• Published: 2009
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utp.edu.my/310/1/paper.pdf; http://www.scopus.com/inward/record.url?eid=2-s2.0-70349197961&partnerID=40&md5=99899e06df2bfb210270767d70196294; http://eprints.utp.edu.my/310/

The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication...