Piezoresistive Pressure Sensor Design, Simulation and Modification Using CoventorWare Software
In this study the properties of a modified MEMS Piezoresistive (PZR) Pressure Sensor device is investigated. The Wheatstone bridge circuit configuration is used to arrange the implanted piezoresistors to measure small resistance change. In the methodology of the study CoventorWare simulation softwar...
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| Main Authors: | , , , |
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| Format: | Citation Index Journal |
| Published: |
Asian Network for Scientific Information
2011
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| Subjects: | |
| Online Access: | http://eprints.utp.edu.my/5284/1/JOURNAL_PAPER.pdf http://scialert.net/current.php?issn=1812-5654 http://eprints.utp.edu.my/5284/ |
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