Thermal Agglomeration of Ultrathin Silicon-on-Insulator Layers: Crystalline Orientation Dependence
The thermal agglomeration of ultrathin silicon-on-insulator (SOI) layers with different crystalline orientations [(110)-, (100)-, and (111)-oriented SOI layers] is reported. (110) SOI agglomeration leads to the formation of Si island arrays along <221> and <332> directions, while (100) a...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://jjap.jsap.jp/cgi-bin/getarticle?magazine=JJAP&volume=47&page=1461 http://eprints.utp.edu.my/7915/ |
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