Piezoresistive pressure sensor using vertically aligned carbon-nanotube forests
A pressure sensor functionalised with vertically aligned carbon nanotubes is presented. The sensor is fabricated to have a multi-walled carbon-nanotube forest supported by a deflectable 8m-thick Parylene-C membrane that is suspended by the silicon frame. The responses of the fabricated sensors are e...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Institution of Engineering and Technology
2011
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/29573/ http://dx.doi.org/10.1049/el.2011.1498 |
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