Fabrication and characterization of a CMOS-MEMS humidity sensor

• Main Authors: Dennis, J.-O., Ahmed, A.-Y., Khir, M.-H.
• Format: Article
• Published: MDPI AG 2015
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84940185622&doi=10.3390%2fs150716674&partnerID=40&md5=280463bfea665cce4fcbe8e02aacde92; http://eprints.utp.edu.my/25972/

This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sen...