Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes

• Main Authors: Aslam, M.Z., Jeoti, V., Karuppanan, S., Pandian, M.S., Ferrer, E.M., Suresh, K.
• Format: Article
• Published: Elsevier B.V. 2020
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85088260385&doi=10.1016%2fj.sna.2020.112202&partnerID=40&md5=b47de403ee17ece178370963e4f8e3ae; http://eprints.utp.edu.my/23194/

In this work, a CMOS compatible surface acoustic wave (SAW) device has been simulated and analyzed on SiO2/AlN/SiO2/Si. The simulation results have been used to characterize a typical fabricated device as well. The phase velocity, coupling coefficient, and temperature coefficient of frequency (TCF)...