Fabrication of nanopore with different parameters in depth and diameter on silicon substrate using one-step focused ion beam milling
Focused ion beam (FIB) technique uses a focused beam of ions to scan the surface of a specimen, analogous to the way scanning electron microscope utilizes electrons. Recent developments of FIB technology have emerged as one of the most advanced multifunctional platforms for nanofabrication. It is a...
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| Format: | Thesis |
| Language: | English |
| Published: |
2022
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| Online Access: | http://eprints.utm.my/id/eprint/99715/1/SufiNazihahSabiliMMJIIT2022.pdf http://eprints.utm.my/id/eprint/99715/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:150814 |
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