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Die-level defects classification using region-based convolutional neural network

Visual inspection process on semiconductors is usually performed by human experts. These inspection tasks require extreme concentration, and the time an inspector could continue the inspection tasks is limited. An automated die-level defects classification system is presented in this paper to replac...

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Bibliographic Details
Main Authors:	You, Kwong Ming, Sheikh, Usman Ullah, Alias, Nurul Ezaila
Format:	Conference or Workshop Item
Published:	2022
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utm.my/id/eprint/98693/ http://dx.doi.org/10.1109/ICSE56004.2022.9863135
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