Evolutionary Fuzzy ARTMAP Neural Networks for Classification of Semiconductor Defects

• Main Authors: Zuwairie, Ibrahim, Tan, Shing Chiang, Watada, Junzo, Marzuki, Khalid
• Format: Article
• Language: English
• Published: IEEE 2014
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://umpir.ump.edu.my/id/eprint/6190/1/Evolutionary_Fuzzy_ARTMAP_Neural_Networks_for_Classification_of_Semiconductor_Defects.pdf; http://umpir.ump.edu.my/id/eprint/6190/; http://dx.doi.org/10.1109/TNNLS.2014.2329097

Wafer defect detection using an intelligent system is an approach of quality improvement in semiconductor manufacturing that aims to enhance its process stability, increase production capacity, and improve yields. Occasionally, only few records that indicate defective units are available and they ar...