Die-level defects classification using region-based convolutional neural network

• Main Authors: You, Kwong Ming, Sheikh, Usman Ullah, Alias, Nurul Ezaila
• Format: Conference or Workshop Item
• Published: 2022
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/98693/; http://dx.doi.org/10.1109/ICSE56004.2022.9863135

Visual inspection process on semiconductors is usually performed by human experts. These inspection tasks require extreme concentration, and the time an inspector could continue the inspection tasks is limited. An automated die-level defects classification system is presented in this paper to replac...