Interface damage of protective layer in TEM lamella preparation for highly doped ge substrate
This work reports on the TEM sample preparation of highly doped germanium (Ge) sample using focused ion beam (FIB) technique. The method of the deposition of protective layer is varied to observe the damage at the interface of protective layer and specimen surface. It is shown that TEM lamella prepa...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/88968/1/NurNadhirahMohamad2019_InterfaceDamageofProtectiveLayer.pdf http://eprints.utm.my/id/eprint/88968/ https://dx.doi.org/10.1088/1757-899X/522/1/012003 |
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