Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition

• Main Author: Ong, Wai Kit
• Format: Thesis
• Language: English
• Published: 2015
• Subjects: QC Physics
• Online Access: http://eprints.utm.my/id/eprint/81448/1/OngWaiKitMFS2015.pdf; http://eprints.utm.my/id/eprint/81448/; http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:120167

The amorphous diamond like carbon (a - DLC) thin films were deposited in 3 hours on glass substrates at the vacuum pressure, 8.0 x 10-2 Torr ; deposition pressure, 4.0 x 10-1 Torr and deposition temperatures, 300 – 500 °C by using direct current plasma enhanced chemical vapour deposition (DC - PECVD...