Structural and optical properties of carbon nanowalls by plasma-enhanced chemical vapor deposition method
Vertically aligned carbon nanowalls (CNWs) were synthesized by catalyst-free 150 MHz high frequency plasma enhanced chemical vapor deposition (PECVD) system, where methane and hydrogen gases were used as the reactive gases. Parametric studies were done to determine the optimum parameters required to...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2015
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| Online Access: | http://eprints.utm.my/id/eprint/81541/1/NoorFarizaSubariMFS2015.pdf http://eprints.utm.my/id/eprint/81541/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:120156 |
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