Comparison of deposition methods of ZnO thin film on flexible substrate

• Main Authors: Idris, A. A. M., Arsat, R., Ahmad, M. K., Sidek, F.
• Format: Article
• Language: English
• Published: Institute of Advanced Engineering and Science 2017
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/74889/1/AAMIdris_ComparisonofDepositionMethodsofZnO.pdf; http://eprints.utm.my/id/eprint/74889/; https://www.scopus.com/inward/record.uri?eid=2-s2.0-85016979197&doi=10.11591%2fijeecs.v5.i3.pp536-541&partnerID=40&md5=aefcbba272ec844a8c8a83610c472423

This paper reports the effect of the different deposition methods towards the ZnO nanostructure crystal quality and film thickness on the polyimide substrate. The ZnO film has been deposited by using the spray pyrolysis technique, sol-gel and RF Sputtering. Different methods give a different nanostr...