Deposition of ZnO-Al (AZO) thin films for optical properties

• Main Authors: Hussin, R., Anuar, S. Z. S., Ibharim, S. A., Kamdi, Z., Ainuddin, A. R., Harun, Z.
• Format: Conference or Workshop Item
• Language: English
• Published: 2021
• Subjects: TS200-770 Metal manufactures. Metalworking
• Online Access: http://eprints.uthm.edu.my/2796/1/P12713_9c6d533035b070a3183aee92d4af5889.pdf; http://eprints.uthm.edu.my/2796/; https://doi.org/10.1063/5.0044520

Zinc Oxide (ZnO) is an inorganic compound and it is doped with aluminum to increase its capabilities. Aluminum Zinc Oxide (AZO) thin films are semiconductor materials that have band gap energy of 3.3eV. Various method of deposition have been study to growth AZO thin films. It has been extensively...