Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire
The annealing of an AlN buffer layer in a carbon-saturated N2–CO gas on a sapphire substrate was investigated. The crystal quality of the buffer layer was significantly improved by annealing at 1650–1700 °C. An AlN buffer layer with a thickness of 300 nm was grown by metalorganic vapor phase epitaxy...
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Online Access: | http://eprints.utm.my/id/eprint/68841/1/HidetoMiyake2016_AnnealingofanAINBufferLayer.pdf http://eprints.utm.my/id/eprint/68841/ http://iopscience.iop.org/article/10.7567/APEX.9.025501 |
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my.utm.688412017-11-14T06:23:15Z http://eprints.utm.my/id/eprint/68841/ Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire Miyake, Hideto Nishio, Gou Suzuki, Shuhei Hiramatsu, Kazumasa Fukuyama, Hiroyuki Kaur, Jesbains Kuwano, Noriyuki QC Physics The annealing of an AlN buffer layer in a carbon-saturated N2–CO gas on a sapphire substrate was investigated. The crystal quality of the buffer layer was significantly improved by annealing at 1650–1700 °C. An AlN buffer layer with a thickness of 300 nm was grown by metalorganic vapor phase epitaxy (MOVPE), and was annealed at 1700 °C for 1 h. We fabricated a 2-µm-thick AlN layer on the annealed AlN buffer layer by MOVPE. The full widths at half maximum of the (0002)- and ($10\bar{1}2$)-plane X-ray rocking curves were 16 and 154 arcsec, respectively, and the threading dislocation density was 4.7 × 108 cm−2. 2016 Article PeerReviewed application/pdf en http://eprints.utm.my/id/eprint/68841/1/HidetoMiyake2016_AnnealingofanAINBufferLayer.pdf Miyake, Hideto and Nishio, Gou and Suzuki, Shuhei and Hiramatsu, Kazumasa and Fukuyama, Hiroyuki and Kaur, Jesbains and Kuwano, Noriyuki (2016) Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire. Applied Physics Express, 9 (2). pp. 1-4. http://iopscience.iop.org/article/10.7567/APEX.9.025501 |
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QC Physics Miyake, Hideto Nishio, Gou Suzuki, Shuhei Hiramatsu, Kazumasa Fukuyama, Hiroyuki Kaur, Jesbains Kuwano, Noriyuki Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire |
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The annealing of an AlN buffer layer in a carbon-saturated N2–CO gas on a sapphire substrate was investigated. The crystal quality of the buffer layer was significantly improved by annealing at 1650–1700 °C. An AlN buffer layer with a thickness of 300 nm was grown by metalorganic vapor phase epitaxy (MOVPE), and was annealed at 1700 °C for 1 h. We fabricated a 2-µm-thick AlN layer on the annealed AlN buffer layer by MOVPE. The full widths at half maximum of the (0002)- and ($10\bar{1}2$)-plane X-ray rocking curves were 16 and 154 arcsec, respectively, and the threading dislocation density was 4.7 × 108 cm−2. |
format |
Article |
author |
Miyake, Hideto Nishio, Gou Suzuki, Shuhei Hiramatsu, Kazumasa Fukuyama, Hiroyuki Kaur, Jesbains Kuwano, Noriyuki |
author_facet |
Miyake, Hideto Nishio, Gou Suzuki, Shuhei Hiramatsu, Kazumasa Fukuyama, Hiroyuki Kaur, Jesbains Kuwano, Noriyuki |
author_sort |
Miyake, Hideto |
title |
Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire |
title_short |
Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire |
title_full |
Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire |
title_fullStr |
Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire |
title_full_unstemmed |
Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire |
title_sort |
annealing of an aln buffer layer in n2-co for growth of a high-quality aln film on sapphire |
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2016 |
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http://eprints.utm.my/id/eprint/68841/1/HidetoMiyake2016_AnnealingofanAINBufferLayer.pdf http://eprints.utm.my/id/eprint/68841/ http://iopscience.iop.org/article/10.7567/APEX.9.025501 |
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