Ultra-sharp pointed tip Si nanowires produced by very high frequency plasma enhanced chemical vapor deposition via VLS mechanism
Needle-like silicon nanowires have been grown using gold colloid as the catalyst and silane (SiH4) as the precursor by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD). Si nanowires produced by this method were unique with sharpness below 3 nm. High resolution transmission e...
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| Main Authors: | , , |
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| Format: | Article |
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Springer
2011
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/29904/ http://dx.doi.org/10.1007/s10853-011-5435-6 |
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