Synthesis and analysis of silicon nanowire below Si-Au eutectic temperatures using very high frequency plasma enhanced chemical vapor deposition

• Main Authors: Wahab, Yussof, Othaman, Zulkafli, Ismail, Abd. Khamim, Hamidinezhad, Habib
• Format: Article
• Published: Elsevier 2011
• Subjects: TP Chemical technology
• Online Access: http://eprints.utm.my/id/eprint/29417/; http://dx.doi.org/10.1016/j.apsusc.2011.05.130

Silicon nanowires (SiNWs) were synthesized from pure silane precursor gas and Au nanoparticles catalyst at below Au-Si eutectic temperature. The SiNWs were grown onto Si (1 1 1) substrates using very high frequency plasma enhanced chemical vapor deposition via a vapor-solid-solid mechanism at temper...