Formation and characterization of silicon self-assembled nanodots
Silicon self-assembled quantum dots have been successfully prepared on corning glass (7059) substrate. The samples were fabricated using the common technique RF magnetron sputtering system depend on plasma excitation at varying growth parameters and high temperature of more than 500°C. The measureme...
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| Main Authors: | , , |
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| Format: | Book Section |
| Published: |
American Institute of Physics
2011
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/29714/ http://dx.doi.org/10.1063/1.3587011 |
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